Figure 83. Secondary electron image of star D on sample 5 etched in chlorine/argon
plasma showing surface features of the sample. There is little contrast in the image
because the gold star is only 10nm thick. However, the gold star is visible on the surface
of the gallium arsenide. There are also two particles on the star.









 A -
 i' ^ ^-b *.p.' i$p:

 W4". V ,.46
 ^^^ -, -"IS^
 -r' .'
 ," .- ( ... _- ..-,

 .. ........ ...... ..... .... ..-
 ', '. ,? ('' 'dl, .;,:. l fs
 -.* ." ., ,.--.t. '*.- o \._,a t i, j. Ir :. .; 1;





Figure 84. Backscatter electron image of star D on sample 5 etched in chlorine/argon
plasma. Areas of different composition are identified by differences in brightness. Two
compositions are observed in this image distinguishing the star from the substrate.