Counts


Energy (keV)


Figure 81. EDS spectrum of point 3 on the substrate near star C of sample 5 etched in
chlorine/argon plasma. Gallium and arsenic peaks are present.






 Counts

 Ga
 15000-



 10000-



 5000-

 C G Cl Ga
 A0 u A Ga As
 0 5 10
 Energy (keV)






Figure 82. EDS spectrum of point 4 on the substrate of sample 5 etched in chlorine/argon
plasma. Gallium and arsenic peaks are present.