Energy (keV)


Figure 79. EDS spectrum of point 1 on star C of sample 5 etched in chlorine/argon
plasma. Gallium, arsenic, and gold peaks are present.


Energy (keV)


Figure 80. EDS spectrum of point 2 on star C of sample 5 etched in chlorine/argon
plasma. Gallium, arsenic, and gold peaks are present.