Counts


0 5 10


Energy (keV)


Figure 73. EDS spectrum for point 4 on the substrate of sample 5 etched in
chlorine/argon plasma. Gallium and arsenic peaks are present.







 Counts

 10000- Ga


 8000-


 6000-


 4000-


 2000-
 C As
 Au Ga
 Ga As


Energy (keV)


Figure 74. EDS spectrum of point 2 on star B of sample 5 etched in chlorine/argon
plasma. Gallium, arsenic, and gold peaks are present.