Counts


0 5 10


Energy (keV)


Figure 71. EDS spectrum for point 4 on the substrate of sample 6 unetched. Gallium and
arsenic peaks are present.


Counts


0 5 10


Energy (keV)


Figure 72. EDS spectrum for point 2 on star A of sample 5 etched in chlorine/argon
plasma. Gallium, arsenic, and gold peaks are present.