Counts


0 5 10


Energy (keV)


Figure 67. EDS spectrum for point 4 on the substrate of sample 2 etched in
chlorine/argon plasma. Gallium and arsenic peaks are present.







 Counts
 10000-
 Ga

 8000-


 6000-


 4000-


 2000-

 : Au Ga
 SLC A --Ga As

 0 5 10
 Energy (keV)


Figure 68. EDS spectrum for point 2 on a star of sample 3 etched in chlorine/argon
plasma. Gallium, arsenic, and gold peaks are present.