Counts




10000-


Energy (keV)


Figure 65. EDS spectrum for point 4 on the substrate of sample 1 unetched. Gallium and
arsenic peaks are present.


Counts
15000-


Energy (keV)


Figure 66. EDS spectrum for point 2 on the star of sample 2 etched in chlorine/argon
plasma. Gallium, arsenic, and gold peaks are present.