APPENDIX A
ADDITIONAL AFM RESULTS


 L1
 3OD




CD )
'E

MD CD
C1
n
Co
>-o


 10m0
X-rarge: 30 [pm]


Sample 3 Etched, Star 3B


 16
 14
 12
 10

 E 8
 C 6
 4
 2


 -2 2 3 4

 microns

 b)
Figure 62. AFM image and line scan plot of sample 3 etched in chlorine/argon plasma.
a) This is an AFM image of sample 3 etched in chlorine/argon plasma. The line drawn
on the image represents the location of a line scan. b) The plot shown represents the
change in height of the sample surface as the AFM tip scans the line drawn on the AFM
sample in Figure Ala of sample 3 etched.