the secondary electron image (Figure 20, pg 28) indicating a change in topography

between the star and the gallium arsenide substrate. Also seen in this image is one

particle on the tip of the star, which is believed to be a contaminant. Backscatter electron

imaging also suggests this particle may be a contaminant. In backscatter imaging

elements with higher atomic number, such as gold, appear brighter than lower atomic

elements, such as the gallium and arsenic. This is true in the backscatter image of the

unetched sample 1 as shown in Figure 21 on page 29. The star is brighter than the

surrounding gallium arsenide. The particle that appeared in the secondary electron image

also appears in the backscatter electron image as a dark area. Since it is darker than the

rest of the image, the particle is most likely a contaminant of a lighter element such as

carbon. An energy dispersive spectroscopy spectrum of that area was taken to identify

what the particle was, Figure 25 on page 31. The spectrum taken at that point was similar

to other points taken on the star where there was no particle; only peaks for gallium,

arsenic, and gold were observed. Thus, it is believed that this particle is most likely a

particle of gallium arsenide that was broken off the sample. Other points on the sample

were analyzed to determine where the gold was. As was expected, all points taken on the

star displayed a gold peak in the spectrums, Figure 23 on page 30. All points taken off of

the star on the substrate displayed only gallium and arsenic peaks, no gold peak, Figure

24 on page 31.

 Samples 2 and 3 are etched in chlorine/argon plasma. Images from both samples

are similar to the images for sample 1. The secondary electron image indicates the

topography difference between the star and the substrate. The gold star is brighter than

the gallium arsenide substrate in the backscatter electron image. Energy dispersive