51



 Counts
 Ga

 8000- F,


 6000-


 4000-


 2000-
 C:
 C Au Ga
 0: a Ga A
 0-
 0 5 10
 Energy (keV)



Figure 59. EDS spectrum for point 8 on a particle on star B, sample 5, etched in
chlorine/argon plasma. Gallium, arsenic, gold, and chlorine peaks are present.