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8000-


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0 5 10


Energy (keV)


Figure 57. EDS spectrum for point 3 on the substrate near star B on sample 5 etched in
chlorine/argon plasma. Gallium and arsenic peaks are present.


Counts


Energy (keV)


Figure 58. EDS spectrum for point 7, star B, with gallium, arsenic, gold, and chlorine
peaks