Counts


10000-





5000-


5 10


Energy (keV


Figure 51. EDS spectrum for point 5, a particle on star A of sample 5 etched in
chlorine/argon plasma. Gallium, arsenic, and gold peaks are present.


 Counts

 Ga


 10000-





 5000-



 G As
 C Au Ga
 a A As


Energy (keV)


Figure 52. EDS spectrum for point 6, a brighter area on the tip of star A on sample 5
etched in chlorine/argon plasma. Gallium, arsenic, and gold peaks are present.