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10000-





5000-


5 10


Energy (keV)


Figure 49. EDS spectrum for point 1 on star A of sample 5 etched in chlorine/argon
plasma. Gallium, arsenic, and gold peaks are present.


Count


Energy (keV)


Figure 50. EDS spectrum for point 3 on the substrate near star
chlorine/argon plasma. Gallium and arsenic peaks are present.


A on sample 5 etched in