energy dispersive spectroscopy spectrum for those points. Points 1 and 2 on star A of

sample 5 had similar spectrums, thus only the spectrum for point 1 is shown. Points 3

and 4 on the substrate of sample 5 had similar spectrums, thus only the spectrum for point

3 is shown. The spectrums for points 2 and 4 are located in Appendix B. Four stars on

sample 5, labeled A, B, C, and D, were analyzed. Due to similarities in the results, only

results from stars A and B are presented as follows. Results for stars C and D are located

in Appendix B.

























Figure 46. Secondary electron image of star A on sample 5 etched in chlorine/argon
plasma showing surface features of the sample. There is little contrast in the image
because the gold star is only 10nm thick. However, the gold star is visible on the surface
of the gallium arsenide. Also present are particles on the star identified as the brighter
spots the image.