Counts
 Ga

10000- s


8000-


6000-


4000-

2000-
 0I As
 1 Gac As
 fJ -: ^ A ________A (a e __


Energy (keV)


Figure 44. EDS spectrum for point 1 on sample 6 unetched. Gallium, arsenic, and gold
peaks are present.


 Counts

 Ga



 10000-





 5000-




 0 Ga AI

 0 5 10
 Energy (eV)



Figure 45. EDS spectrum for point 3 on the substrate of sample 6 unetched. Gallium and
arsenic peaks are present.


3.2.5 Sample 5 Gallium Arsenide with Gold Stars Etched in Chlorine/Argon Plasma


 Sample 5 is gallium arsenide with gold stars that was etched for 90 seconds at


5mTorr in chlorine/argon plasma. The following figures include secondary electron


image, backscatter electron image, an energy dispersive spectroscopy point map, and