AuMb. 33






Figure 40. EDS line scan spectrum for gold on sample 3 etched in chlorine/argon
plasma.


3.2.4 Sample 6 Unetched Gallium Arsenide with Gold Stars

 Sample 6 is gallium arsenide with gold stars that has not been etched. It is

representative of Sample 5 prior to etching and will be used as a basis for comparison. It

is important to note that the shape of the stars on samples 5 and 6 are different from that

of samples 1, 2, and 3 due to underexposure during the electron-beam lithography

process. Energy dispersive spectroscopy spectrums for both points 1 and 2 on the star of

sample 6 were similar and showed gold peaks indicating the presence of gold. Figure 44