Counts


10000


8000


6000


4000


2000


 0


Energy (keV


Figure 38. EDS spectrum for point 3 on the substrate of sample 3 etched in
chlorine/argon plasma. Gallium and arsenic peaks are present.


 Counts


 10000 Ga


 8000


 8000-
 C

 4000-


 2000 I


Energy (keV


Figure 39. EDS spectrum for point 5 on the dark area on the tip of the star in sample 3
etched in chlorine/argon plasma. Gallium, arsenic, and carbon peaks are present.


- Ga
 Ga













 Sa As
 Sa AsGa
 = ^ j Ga .__________se_ f ___