AuMb. 50





Figure 33. EDS line scan spectrum for gold for sample 2 etched in chlorine/argon
plasma. The line drops down when off of the star. This indicates that gold is on the star
but not on the substrate.

3.2.3 Sample 3 Gallium Arsenide with Gold Particles Etched in Chlorine/Argon
 Plasma

 Sample 3 is gallium arsenide with gold stars that was etched for 60 seconds at

5mTorr in chlorine/argon plasma. The following figures include secondary electron

image, backscatter electron image, an energy dispersive spectroscopy point map, and

energy dispersive spectroscopy spectrum for those points. Points 1 and 2 on the star of

etched sample 3 had similar spectrums, thus only the spectrum for point 1 is shown.

Points 3 and 4 on the substrate of etched sample 3 had similar spectrums, thus only the

spectrum for point 3 is shown. The spectrums for points 2 and 4 are located in Appendix

B.