Counts

 15000-
 Ga



 10000




 5000-



 C Au Ga
 C Ga As
 0-
 0 5 10
 Energy (keV


Figure 31. EDS spectrum for point 1 on the center of the star of sample 2 etched in
chlorine/argon plasma. Gallium, arsenic, and gold peaks are present.


Counts


Energy keV)


Figure 32. EDS spectrum for point 3 on the substrate of sample 2 etched in
chlorine/argon plasma. Gallium and arsenic peaks are present.