3.2.2 Sample 2 Gallium Arsenide with Gold Particles Etched in Chlorine/Argon
 Plasma

 Sample 2 is gallium arsenide with gold stars that was etched for 90 seconds at

10mTorr in chlorine/argon plasma. The following figures include secondary electron

image, backscatter electron image, energy dispersive spectroscopy point map, and energy

dispersive spectroscopy spectrum for those points. Points 1 and 2 on the star of etched

sample 2 had similar spectrums, thus only the spectrum for point 1 is shown. Points 3

and 4 on the substrate of etched sample 2 had similar spectrums, thus only the spectrum

for point 3 is shown. The spectrums for points 2 and 4 are located in Appendix B.

























Figure 28. Secondary electron image of sample 2 etched in chlorine/argon plasma
showing the surface features of the sample. There is little contrast in the image because
the gold star is only 10nm thick. However, the gold star is visible on the surface of the
gallium arsenide.