Table 3. Average height and standard deviation for Samples 1, 2, 3, 5, and 6 Sample 1 2A 2B 3A 3B 6 5A 5B Average Average 12.55 11.65 11.50 12.00 10.95 12.45 12.20 13.30 Height (nm) Standard 1.00 2.01 2.04 1.75 2.26 1.64 2.50 1.13 Deviation 3.2 Field Emission Scanning Electron Microscopy and Energy Dispersive Spectroscopy 3.2.1 Sample 1 Unetched Gallium Arsenide with Gold Stars Sample 1 is gallium arsenide with gold stars that has not been etched. It is representative of samples 2 and 3 prior to etching and will be used as a basis for comparison. Figure 20. Secondary electron image of sample 1 unetched showing surface features of the sample. There is little contrast in the image because the gold star is only 10nm thick. However, the gold star is visible on the surface of the gallium arsenide.