The average height is 12.45nm. Figure 18a includes an AFM image of sample 6

unetched. There is a line drawn in where one of the twenty line scan were taken. Shown

in Figure 18b is the plot of the height from that line scan.


 -2S581
X-range: 30 {pIm]


Sample 6 Unetched


 16
 14
 12
 10
 E 8-
 S6
 4
 2
 0 6-- -------------

 -2. 1 2 3 4
 microns
 b)
Figure 18. AFM image and line scan plot of sample 6 unetched. a) This is an AFM
image of sample 6 unetched. The line drawn on the image represents the location of a
line scan. b) The plot shown represents the change in height of the sample surface as the
AFM tip scans the line drawn in on the AFM image in Figure 18a of sample 6 unetched.
Note the relative smoothness of the scanned surface.

3.1.5 Sample 5 Gallium Arsenide with Gold Stars Etched in Chlorine/Argon Plasma

 Sample 5 is gallium arsenide with gold stars that was etched for 90 seconds at

5mTorr in chlorine/argon plasma. Two stars on etched sample 5 were analyzed, 5A and