2&414 2&42& 2E44
 X-range: 3I mrn]
 a)


 Sample 3 Etched

 18
 16
 14
 12
 10
 I 8
 6
 4


 -2 )1 2 3 4
 microns
 b)

Figure 17. AFM image and line scan plot of sample 3 etched in chlorine/argon plasma.
a) This is an AFM image of star A on the etched sample 3. The line drawn on the image
represents the location of a line scan. b) The plot shown represents the change in height
of the sample surface as the AFM tip scans the line drawn on the AFM image in Figure
17a of star 3A on etched sample 3. Note the roughness of the sample surface.

3.1.4 Sample 6 Unetched Gallium Arsenide with Gold Stars

 Sample 6 is unetched gallium arsenide with gold stars. It is representative of

sample 5 prior to etching and will be used as a basis for comparison. It is important to

note that the shape of the stars on samples 5 and 6 are different from that of samples 1, 2,

and 3 due to underexposure during the electron-beam lithography process. Line scans

were taken through twenty points of the edge of the star to obtain an average star height.