30.0 pM


Data type
2 range


Height
19.4 nM


Sample 2 Etched


 18
 16
 14
 12
 10
E 8
 6
 4
 2
 0
 -2


microns


 b)

Figure 16. AFM image and line scan plot of sample 2 etched in chlorine/argon plasma.
a) This is an AFM image of sample 2 etched in chlorine/argon plasma. The line drawn
on the image represents the location of a line scan. b) The plot shown represents the
change in height of the sample surface as the AFM tip scans the line drawn on the AFM
image in Figure 16a of sample 2 etched. Note the roughness of the surface, particularly
that of the gold star which appears more rough than the gallium arsenide surface.


0
0