template for the star array. Gold was then deposited onto the sample with a metal

evaporator filling the voids created during electron beam lithography to form the gold

stars. The samples were then analyzed for any changes in surface characteristics after

being etched using atomic force microscopy, scanning electron microscopy and energy

dispersive spectroscopy techniques. Scanning electron microscopy and energy dispersive

results show that the gold stars remained intact on the substrate surface. There was no

significant change in surface conditions between etched and unetched samples, indicating

that the presence of gold did not enhance the etching of the gallium arsenide. Analysis

with atomic force microscopy gave results that led to the same conclusion. The atomic

force microscopy results did show that the surface was etched. Unetched samples had a

relatively smooth surface while the etched samples exhibited a rough surface

characteristic of etching. Through this research using these methods it was shown that

gold does not influence the etching of gallium arsenide in chlorine plasma.