43 Backscatter electron image of sample 6 unetched with map of EDS points.........42

44 EDS spectrum for point 1 on sample 6 unetched........................................43

45 EDS spectrum for point 3 on the substrate of sample 6 unetched.......................43

46 Secondary electron image of star A on sample 5 etched in chlorine/argon
 plasm a ......... .... .............. .................................... ...........................44

47 Backscatter electron image of star A on sample 5 etched in chlorine/argon
 plasm a ......... .... .............. .................................... ...........................4 5

48 Secondary electron image of star A on sample 5, etched, with map
 of E D S points ................................................. ................. 45

49 EDS spectrum for point 1 on star A on sample 5 etched....................................46

50 EDS spectrum for point 3 on the substrate near star A on sample 5.....................46

51 EDS spectrum for point 5, a particle on star A of sample 5...............................47

52 EDS spectrum for point 6, a brighter area on the tip of star A on sample 5..........47

53 Secondary electron image of star B on sample 5 etched in chlorine/argon
 plasm a ......... .... .............. .................................... ...........................4 8

54 Backscatter electron image of star B on sample 5 etched in chlorine/argon
 plasm a ......... .... .............. .................................... ...........................4 8

55 Secondary electron image of star B on sample 5 etched, with map
 of E D S points ................................................. ................. 49

56 EDS spectrum for point 1 at the center of star B on sample 5 etched...................49

57 EDS spectrum for point 3 on the substrate near star B on sample 5 etched..........50

58 ED S spectrum for point 7, star B ....................................... ........................ 50

59 EDS spectrum for point 8 on a particle on star B, sample 5, etched...................51

60 This is a plot of the etched samples 2 and 3 line scans superimposed .................53

61 This is a plot of the etched sample 5 line scan superimposed..............................54

62 AFM image and line scan plot of sample 3 etched in chlorine/argon plasma.......60