20 Secondary electron image of sample 1 unetched...................................... 28

21 Backscatter electron image of sample 1 unetched..................................29

22 Secondary electron image with map of EDS points............................................29

23 EDS spectrum for point 1 at the center of a star on sample 1 unetched ............30

24 EDS spectrum for point 3 on the substrate of sample 1 unetched.....................31

25 EDS spectrum for point 5 on the particle on the tip of the star..........................31

26 EDS spectrum for point 6 on a dark dot on the substrate of sample 1...............32

27 EDS gold line scan spectrum on sample 1 unetched................ ..............32

28 Secondary electron image of sample 2 etched in chlorine/argon plasma............33

29 Backscatter electron image of sample 2 etched in chlorine/argon plasma..........34

30 Backscatter electron image with map of EDS points.......... ...............34

31 EDS spectrum for point 1 on the center of the star of sample 2 etched ..............35

32 EDS spectrum for point 3 on the substrate of sample 2 etched........................35

33 EDS line scan spectrum for gold for sample 2 etched...............................36

34 Secondary electron image of sample 3 etched in chlorine/argon plasma............37

35 Backscatter electron image of sample 3 etched in chlorine/argon plasma..........37

36 Backscatter electron image with map of EDS points.......... .............. 38

37 EDS spectrum for point 1 on the star of sample 3 etched...........................38

38 EDS spectrum for point 3 on the substrate of sample 3 etched........................39

39 EDS spectrum for point 5 on the dark area on the tip of the star...........................39

40 EDS line scan spectrum for gold on sample 3 etched.............. ................40

41 Secondary electron image of sample 6 unetched........................................41

42 Backscatter electron image of sample 6 unetched.....................................42