The data suggest that ZnS promotes a high density of interface states which are deep enough to result in an exceptional turn-on character [45]. Table 2.1 List of the insulators used in ACTFEL devices with values for the properties of interest. Deposition Er FBD gOgrFBD Breakdown Insulator Method ( MV/cm) ( [C/cm2) Mode Si02 Sputtering 4 6 2 Self Healing* SiOxNy Sputtering 6 7 4 Self Healing SiOxNy PCVD 6 7 4 Self Healing Si3N4 Sputtering 8 6-8 4-6 Self Healing A1203 ALE 8 8 6 Self Healing A1203 Sputtering 8 5 3.5 Self Healing SiAlON Sputtering 8 8-9 4-6 Self Healing Y203 Sputtering 12 3-5 3-5 Self Healing Y203 EBE 12 3-5 3-5 Self Healing BaTiO3 Sputtering 14 3.3 4 Self Healing Sm203 EBE 15 2-4 3-5 Self Healing HfO2 Sputtering 16 0.17-4 0.3-6 Self Healing Ta20O-TiO2 ALE 20 7 12 Self Healing BaTa206 Sputtering 22 3.5 7 Self Healing TiO2 ALE 60 0.2 1 Propagating Sr(Zr,Ti)03 Sputtering 100 3 26 Propagating SrTiO3 Sputtering 140 1.5-2 19-25 Propagating Self healing: when breakdown initiates, the material can inherently isolate the localized breakdown and prevent catastrophic breakdown [36].