3 EXPERIMENTAL PROCEDURE.................................... ................................... 35 3.1 Introduction ................................................................................................. ..... 35 3 .2 D ev ice F ab rication ......................................................................... ..................3 5 3 .2 .1 S u b stra te s ....................................................................................3 5 3.2.2 Phosphor Film D position .................................... ................................... 35 3.2.4 A l Film D position ......................................................... ............... 38 3.2.5 R apid Therm al A nnealing ........................................ ........................ 38 3.3 D vice C haracterization................................................. ............................. 42 3 .3 .1 E L M easu rem ent ............................................................... ....................42 3 .3 .2 Q -V M easurem ent ............................................................. ....................4 5 4 COMPARISON OF INFRARED EMISSION FROM HALF-STACK AND FULL- STACK ZINC SULFIDE RARE EARTH FLUORIDE ACTFEL DEVICES...........47 4.1 Introduction..................................... ......................... ..... ......... 47 4.2 E xperim mental .......................................................................... ..... ......... 47 4 .3 R e su lts................................... ............................................ 4 9 4.3.1 ZnS:ErF3 as ACTFEL Phosphor ............................ ........................49 4.3.1.1 EL properties com prison ...................................... ............... 49 4.3.1.2 Electrical m easurem ents ..... ................................... ..... .............56 4.3.2 ZnS:TmF3 as ACTFEL Phosphor...................................... ............... 60 4.3.2.1 EL properties com prison ...................................... ............... 60 4.3.2.2 Electrical m easurem ents ........... .. ........... ....... ...... ............60 4.4 Discussion ................ ........ ................. 70 5 C O N C L U SIO N ......... ......................................................................... ......... ........75 LIST OF REFEREN CES ...................................................................... ............... 76 B IO G R A PH IC A L SK E TCH ...................................................................... ..................79 v