modification or contact is necessary to take measurements. Imaging procedures like

SEM require a surface coating and high-energy treatment of the surface, which may

change the properties as well as rendering the sample itself unusable in the future.

 Figure 3.11 shows representative 3-D renderings of an unmodified silicone copy

off the 5 gm deep textures. Figure 3.12 includes profilometry images taken directly off

the wafer for comparison. The textures in Figure 3.11 were replicated from epoxy,

demonstrating the ability of the epoxy system to faithfully recreate the wafer's features.

Note that these copies are in effect the "negative" of the wafers, in that the ridges have

varying widths and the grooves are a constant width and depth of 5 gm.


A 5 npm wide


B 10 pm wide


 C 20 pm wide D 10 pm wide

Figure 3.11 3-D images of 5 gm deep elastomer samples copied off of epoxy taken with
optical profilometer (50X). (A-C) are examples of the ridges at the different spacing. (D)
demonstrates the smooth/textured interface


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