10'
                       -          150 K

                              200 K







        
        010
        L



           10-  I 2 1350 K










               '1014             l15              1016             l17              1018
                                                           3
                                          Boron Density (cm-)



Figure 5.8. Theoretical Hall mobility as a function of dopant density for boron-doped silicon
            with temperature as a parameter.